A revolution in TEM imaging and metrology volumes
Time to market is becoming crucial for the commercial success of mobile electronic devices. Time to yield is critical to generate the required return on investment and commercial success of each product. Yield analysis at many of the steps in the manufacture of a semiconductor device used to be monitored by visual or SEM based tool sets, but these are now increasingly dependent on feedback and metrology from TEM images. FEI is enabling this transition from SEM to TEM with new high productivity tool workflows which provide the lowest possible cost per TEM sample.