Themis S TEM
The Themis S system is Thermo Fisher’s latest addition to the industry-standard Themis TEM platform. Targeted at the needs of semiconductor failure analysis labs working at the sub-20nm technology node, the Themis S system is designed for high-volume
semiconductor imaging and analysis and includes an integrated vibration isolation enclosure and full remote operation capability. The probe-corrected, 80–200kV column, automated alignments, XFEG source and DualX X-ray spectrometer provide robust,
sub-Ångström imaging and fast, accurate elemental and strain analysis.
Learn more about the Themis S TEM