Transmission Electron Microscope

Metrios TEM for Semiconductors

The first TEM dedicated to the semiconductor industry

Advanced logic and memory manufacturing processes are becoming more reliant on fast turnaround of precise structural and analytical data to be able to quickly calibrate tool sets, diagnose yield excursions, and optimize process yields. At technology nodes below 28nm, especially in cases where non-planar device designs are being implemented, conventional SEM or optical-based analysis and inspection tools cannot provide useful data. FEI's Metrios™ is the first TEM dedicated to providing the fast, precise measurements that semiconductor manufacturers need to develop and control their wafer fabrication processes.




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High-volume TEM data, accurate and repeatable - at the lowest cost-per-sample

FEI's Metrios automates the basic TEM operation and measurement procedures, minimizing the requirements for specialized operator training. Its advanced automated metrology routines deliver significantly greater precision than manual methods. The Metrios TEM is designed to provide customers with improved throughput and lower cost-per-sample than other TEMs.