Scanning Electron Microscope

Verios XHR SEM

The FEI Verios scanning electron microscope (SEM) is the second generation of FEI’s leading XHR (extreme high resolution) SEM family. It provides sub-nanometer resolution from 1 to 30 kV and enhanced contrast needed for precise measurements on materials in advanced semiconductor manufacturing and materials science applications, without compromising the high throughput, analytical capabilities, sample flexibility and ease of traditional Scanning Electron Microscope (SEM).

Verios SEM for Materials Science

For Materials Scientists, the Verios SEM enables important new insights by extending sub-nanometer characterization to novel materials being developed today (e.g., catalyst particles, nanotubes, porosities, interfaces, biological objects and other nanoscale structures). High-resolution, high-contrast images are obtained without the need to transition to TEM or other imaging techniques. The Verios SEM offers all the flexibility required for research applications to accommodate large specimens like full wafers or metallurgical samples. You can perform fast analysis thanks to its high current mode or work on precise prototyping applications such as electron beam-induced direct deposition of materials or lithography.

Product Models