Scanning Electron Microscope

FEI Verios XHR SEM for Semiconductors

The best possible low-kV SEM resolution and materials contrast

Verios is geared toward increasing publishable results from your lab. In the Semiconductor and Data Storage markets, the unprecedented performance of Verios extends scanning electron microscope (SEM) capability to the era of sub-20nm semiconductor devices. Verios allows semiconductor process control labs to measure beam-sensitive materials and structures that are too small to be imaged by conventional SEM instruments. Verios also includes new ease-of-use features that deliver the lowest cost-per-sample imaging and metrology on semiconductor structures at the 22nm node and below. Verios XHR SEM offers a complete solution for basic research, process and material development, process control, and failure analysis. It delivers accurate, repeatable measurement results, even on extremely sensitive materials. Combined with FEI's IC3D™ metrology software, Verios provides the precise measurements needed to control technology development processes.

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Discover the world of eXtreme High-Resolution SEM

Verios is the second generation of FEI's leading XHR SEM family, offering accurate imaging with sub-nanometer resolution from 1 to 30 kV energy range. It provides the excellent contrast needed for precise measurements on materials in a variety of applications without compromising the high throughput, analytical capabilities, sample flexibility, and ease of traditional SEMs. Verios features unique technologies such as constant power lenses for higher thermal stability and electrostatic scanning for higher deflection linearity. It is extremely flexible when it comes to choosing parameters, working on large samples, or supporting additional applications like analysis or lithography. Verios XHR SEM allows both occasional users and specialists to access accurate and complete nanoscale data in the shortest time, discovering information that previously has been unavailable from other techniques.

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Verios XHR SEM Datasheet

The Verios is the second generation of FEI's leading XHR SEM family, offering sub-nanometer resolution over the full 1 keV to 30 keV energy range with excellent materials contrast.

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