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Electron Microscopy Solutions
Scanning Electron Microscopes

Apreo SEM for Materials Science

The most versatile high-performance SEM

The Apreo scanning electron microscope's (SEM) revolutionary compound lens design combines electrostatic and magnetic immersion technology to yield unprecedented resolution and signal selection. This makes the Apreo SEM the platform of choice for research on nanoparticles, catalysts, powders and nanodevices, without compromising on magnetic sample performance.

The Apreo SEM benefits from the unique in-lens backscatter  detection, which provides excellent materials contrast,  even at tilt, short working distance, or on sensitive  samples. The novel compound lens further improves  contrast with energy filtering and adds charge filtering  for imaging of insulating samples. The optional low  vacuum mode now has a 500 Pa maximum chamber  pressure for imaging even the most demanding  insulators.

With all these options, including the compound final lens, advanced detection and flexible sample handling, the Apreo SEM's performance and versatility will meet your research challenges for many years to come.





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Experience the advantages of the Apreo SEM

  • The unique compound final lens delivers an exceptional  resolution of 1.0 nm at 1 kV,  without the need for beam  deceleration - on any sample,  even if it is tilted or  topographic. 
  • The most useful backscatter detection - materials contrast  is always available, even at low  voltage and beam currents, at  any tilt angle, on beam sensitive  samples and at TV-rate imaging.  
  • Unparalleled detector flexibility - obtain the contrast  or signal intensity that matters  most by combining information from individual detector segments.
  • The widest range of charge mitigation strategies , including a low vacuum mode with a chamber pressure of up to 500 Pa to enable imaging of any sample.
  • A superior analytics platform provided by high beam currents and a small spotsize. The chamber supports three EDS detectors, coplanar EDS & EBSD, and low vacuum optimized for analytics.
  • Easiest sample handling and navigation with the multi-purpose sample holder and the Nav-Cam+.
  • Expert results for new users through advanced user guidance, presets and undo functionality.
Pd nanoparticles in CeO2 matrix.
Sample courtesy of Dr. Alessandro Lavacchi, CNR ICCOM
Silica coated nanocellulose fibers.
Sample courtesy of Dr. M.C.D. Mourad, TNO Eindhoven
Hydroxyapatite crystals.
Sample courtesy of Devin Wu, FEI China and Shanghai Institute of Ceramics

Featured Document

The Apreo SEM Datasheet

The Apreo SEM's revolutionary compound lens design combines electrostatic and magnetic immersion technology to yield unprecedented resolution and signal selection. Its unique detector system, high-pressure low-vacuum mode, and smart scanning offer many strategies for dealing with challenging samples. This versatility makes the Apreo SEM the platform of choice for research on nanoparticles, catalysts, powders, and nanodevices, without compromising on magnetic sample performance.

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The Apreo SEM FAQ's

Do I need to insert the GAD detector before I switch to low-vacuum mode?

Low-vacuum mode is accessible without any accessory mounted. The accessible pressure range will be up to 50 Pa. With a pressure limiting aperture (PLA) such as the Gaseous Analytical Detector (GAD), the results will further improve. Moreover, with the GAD, pressures up to 500 Pa are possible.

What does "optional" mean for the immersion lens?

The immersion lens is not required when configuring the system and it is also not required to use if installed. The Apreo SEM achieves a resolution of 1.3 nm at 1 kV. With the immersion lens installed and excited, this improves to 1.0 nm at 1 kV. On top of this, additional compound lens filtering capabilities are available.

Can you use immersion while the electrostatic column is off?

In principle, no. The best results are obtained with both the acceleration tube and immersion lens on. There is no clear use case for immersion only. By default, the Apreo SEM operates with the acceleration tube on, and immersion is switched on when required.

Do the in-column detectors (T1, T2, T3) work at TV rate?

Yes, they do.

You're saying beam deceleration is not possible on a tilted sample. Why is that?

Beam deceleration (BD) creates an electrostatic field between the sample and the pole piece. With a tilted sample, the field lines will be at an angle, and this introduces stigmation in the image. This also happens for samples with large topographic features. As a result, even though BD is a very useful feature and comes standard on the Apreo SEM, it cannot be used 100% of the time. Therefore, the Apreo SEM does not rely on BD to achieve its resolution. The no-BD resolution is 1.0 nm at 1 kV for the immersion system and 1.3 nm at 1 kV without immersion lens.

How much does the Apreo SEM cost?

Never before has access to this level of performance and versatility been available in one product at a very attainable price. Please contact us for your customized quote.