Scanning Probe Microscope (SPM) - Based Nanoprobing System with PicoCurrent Fault Visualization
The FEI Hyperion system offers fast, accurate transistor probing for electrical characterization and fault localization in support of semiconductor technology development, yield engineering and device reliability improvement. The unparalleled stability of the Hyperion system enables nanoprobing down to the 10nm technology node and beyond.
Hyperion system's SPM technology enables PicoCurrent imaging-a technique to rapidly identify shorts, opens, leakage paths and resistive contacts with more than 1000 times the sensitivity of passive voltage contrast. The Scanning Capacitance Microscopy (SCM) module provides image-based fault localization for SOI wafers, as well as high resolution dopant profiling.
- Proven nanoprobing solution for 10nm technology
- Configurable with four, six or eight probes for added flexibility and capability
- Auto tip exchange and auto tip approach for increased productivity and ease of use