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Electron Microscopy Solutions

Meridian 7 System for Semiconductors

Advanced Optical Fault Isolation

The new FEI Meridian 7 system provides visible laser voltage imaging and probing and dynamic laser stimulation on sub-10nm devices. By avoiding a requirement for ultra-thin substrates, it preserves the integrity and functionality of the device under test to provide a reliable and practical production solution. It offers a 25 percent optical resolution enhancement over the previous-generation system and has a smaller spot size for better fault localization. In addition, the new Meridian 7 system offers more certainty in navigation and computer-aided design (CAD) overlay, less cross-talk and higher waveform signal-to-noise.

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Key Benefits

  • Dynamic Optical Fault Isolation for 10nm node and below
  • 7 GHz bandwidth for at-speed tests
  • High resolution visible and Infrared light
  • High-yield sample preparation to 5μm widely available
785nm SIL imaging and dynamic LSM analysis. 5um sample preparation.

Electron Microscopy Solutions

We have updated the appearance of FEI.com with the Thermo Fisher Scientific brand. This transition is an exciting moment as we continue to advance our world-leading electron microscopy solutions.