DualBeam Microscope

Helios NanoLab DualBeam

 The Helios NanoLab™  DualBeam™  has always combined FEI's best electron and ion optics, accessories and software to deliver a powerful solution for advanced nanoscale research. For scientists working at nanotechnology's leading edge, Helios NanoLab lets them push boundaries and create new possibilities for materials research. 

With highly valued sub-nm SEM imaging, the capability to produce ultra-thin samples for S/TEM, and the most precise prototyping capabilities, scientists choose the Helios NanoLab as their partner for innovating new materials and nanoscale devices that will influence future advancements.

FEI delivers our 1000 th Helios DualBeam

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Helios NanoLab for Materials Science

In materials science, the challenge for researchers is to continually improve the quality of materials and devices being fabricated today. Understanding structural and compositional details down to the nanoscale is paramount to achieving technology advancements. Helios NanoLab is designed to deliver multi-scale, multi-dimensional insights, down to sub-nm resolution, to let researchers visualize the finest details of their sample. Helios NanoLab also rapidly produces the highest quality samples for atomic resolution S/TEM imaging. Further, when research includes developing MEMS or NEMS devices, Helios NanoLab can be equipped to create fully functional prototypes.

Product Models

Helios NanoLab for Semiconductors

The Helios NanoLab is a highly flexible platform delivering both high productivity TEM sample preparation and high performance low kV imaging for advanced logic and memory device analysis. Available in both large and small chamber configurations, which enable high efficiency, the Helios Nanolab is a critical component of our low cost per sample semiconductor analysis workflows for both laboratory and near-fab environments.

Product Models

Helios NanoLab for Oil & Gas

The Helios NanoLab technology is used by geologists and reservoir engineers to perform  2D and 3D rock characterization on cuttings and micro-cores. It utilizes unique DualBeam technology, which combines FIB (Focused Ion Beam) milling and SEM (Scanning Electron Microscope) analysis. Automated sequential sample milling and imaging allows for the creation of serial 2D images, which in turn leads to 3D volume reconstructions. From these data, textures such pore networks, can be visualized and quantified at the micron to nano-scale.