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DualBeam Microscope

Helios NanoLab 1200AT DualBeam for Semiconductors

TEM samples supporting the 10nm node via automation technology

The FEI Helios NanoLab 1200AT DualBeam™ can create site-specific transmission electron microscope (TEM) samples thin enough to capture a single transistor at the 10nm node, from wafers up to 300mm in diameter. An optional Automated FOUP Loader (AFL) allows the system to be located inside the semiconductor wafer fab, where it can deliver critical information up to three times faster than laboratory-based analysis.

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Available with fab compatible Automated FOUP Loader (AFL) option

An optional Automated FOUP Loader (AFL) allows the Helios NanoLab 1200AT DualBeam system to be located inside the semiconductor wafer fab, where it can be used to extract ultrathin samples of targeted structures and defects for examination in a high-resolution transmission electron microscope (TEM). Moving the 1200AT inside the fab and closer to the wafer process line (near-line) can deliver critical information up to three times faster than laboratory-based analysis of cleaved wafer pieces, enabling acceleration of the development of new processes and the yield ramp to high-volume production.

iFast Semiconductor Wafer Navigation

Navigation for Semiconductor applications has been greatly enhanced to allow workflows to run in a more automated, robust and routine manner. Defect Navigation has been integrated into the iFast framework to allow for efficient processing of sites imported via defect files. Wafer maps & site plans can be constructed in iFast and each site processed via automated recipes. Cell navigation functionality previously delivered through a stand-alone application has been integrated into iFast for improved ease of use. FEI's proprietary Cell Navigator software automatically locates the proverbial needle in a haystack. This software has the ability to navigate to a single SRAM bit in a 50nm lateral field.

iFast Runner

MultiChem Gas Delivery System

The most advanced beam chemistry solution for DualBeams provides more precisely controlled deposition and etching capabilities and can be utilized with automated applications. The MultiChem is a compact 6-injection line gas delivery system with advanced, integrated process control capabilities. Individual heating and gas flow control valves on each injection line are used to precisely manage the quantity of gas injected. Motorized injection needle and saved position presets allow a user to position the needle accurately for optimized, reproducible gas delivery on the sample surface.

MultiChem

EasyLift NanoManipulator

EasyLift's low-drift, high-precision movements allow simple and consistent creation of traditional TEM lamella or ultra-thin lamella using the inverted thinning technique. The EasyLift is integrated with the microscope's xT software to provide a simple, intuitive method for lift-out and transfer of TEM samples to a grid, all within the DualBeam chamber. Highly accurate and fast motorized rotation makes the EasyLift ideally suited for high speed inverted or plan view sample preparation. Functionality includes simple "click and drag" movement enabled by EasyLift's full integration with the Helios NanoLab 1200AT DualBeam's user interface.

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