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The ionized particles that are generated by the ion beam milling process in a DualBeam (FIB-SEM) can be used for material analysis, as they can be identified and quantified. Because these particles come from a very shallow depth, the technique known as Secondary Ion Mas Spectroscopy (SIMS) is considered a surface analysis technique. A modern TOF detector is compact and suited to measuring all elements of the periodic table, including all possible isotopes. Various aspects of the technique are described in this application note.
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