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Metrios Datasheet

Key benefits

  • Consistent, repeatable, precise, designed from the groundup to deliver repeatable TEM and S/TEM-based imaging, analytics and gauge capable metrology free of operator bias
  • Guaranteed metrology accuracy, less than 1% combined error in distortion and magnification calibration for both TEM and S/TEM
  • Automated EDS and hybrid metrology, acquire and quantify EDS data with automation. Use elemental contrast on key critical dimensions to extend STEM
  • Workflow connectivity, critical process data is tracked through sample prep, plucking, and imaging. Metrology can be applied offline to maximize tool acquisition time. All imaging and metrology data is consolidated in a web-based image viewer.

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