Low keV FIB Applications for Circuit Edit
Focused Ion Beam (FIB) tools are ubiquitous in the semiconductor industry, and are used to perform a wide range of Failure Analysis (FA) activities, from fault isolation to TEM sample prep. FIB tools are also used to perform “Circuit Edit,” (CE), in which existing Integrated Circuit (IC) devices are modified to create prototype devices that simulate potential mask changes. This greatly reduces the time and expense associated with the design validation and debug process, and speeds the product time-to-market.
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