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Electron Microscopy Solutions

FEI Components

Unrivaled Performance in Charged Particle Optics

FEI is a world-leader in electron microscopy component products such as thermal field emission sources and liquid metal ion sources.

Select a Component Type:

Electron and Ion Sources
Emission, electron and ion source products include single crystal tungsten and thermal field Schottky electron emitters.
OEM Custom Products
FEI custom-builds single lens Schottky field emission electrostatic electron sources for a variety of OEM applications.

Electron & Ion Sources

FEI, the world leader in field emission technology since 1971, offers an array of electron and ion source solutions.

Thermal Field Emitters

Schottky emission, a form of thermal field emission, is the leading electron source technology used in FEI's advanced electron beam equipment. The most common applications of Schottky emissions are seen in high resolution SEM, TEM, e-beam lithography, and Auger systems.

Advantages

  • Easy to use
  • Long source life
  • Small virtual source size
  • High brightness
  • High stability
  • Low noise

Liquid Metal Ion Sources (LMIS)

LMIS is the answer to high resolution, focused ion beam (FIB) imaging, nanofabrication, depth profiling, SIMS*, ion doping and ion beam lithography. FEI uses LMIS in a variety of configurations: FIB columns, FIB systems, and DualBeam systems.

Advantages

  • High angular intensity
  • Stable emission process

Single Crystal Tungsten

FEI also offers zone refined single crystal tungsten wire in a myriad of orientations, diameters, and lengths.

LaB6 and CeB6 emitters

For information about FEI's LaB6 and CeB6 emitters, contact FEI's local customer service team. For non-FEI system inquiries, contact Applied Physics Technologies.

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Contact a Sales Representative

OEM Custom Products

The world's leading microscopy and analytical systems manufacturers rely on FEI’s columns. We create superior designs and manufacture them using a reliable, high volume methodology.

We offer integrated design services, from initial concept to mass column production. Whether you want a unique column design or to outsource your current column production, your operation will benefit from a partnership with FEI.

Manufacturing excellence

FEI's world-class manufacturing organization relies on established quality practices, from design-for-manufacturability to standard process control techniques. We produce the world's highest volume of electron and ion columns and sources.

FEI component partner OEM customers are involved in the following applications:

  • CD SEM
  • Electron beam defect review
  • Electron beam defect inspection
  • High resolution UHV SEM imaging
  • Auger analysis
  • SPM probe positioning
  • SIMS and TOF-SIMS
  • Depth profiling
  • FIB surface modification

Need more information?

Contact a Sales Representative

2017 Nobel Prize in Chemistry

Congratulations to the winners of the 2017 Nobel Prize in Chemistry. Three scientists; Dr. Jacques Dubochet, Dr. Joachim Frank, and Dr. Richard Henderson, were awarded the prize for their developments within Cryo-Electron Microscopy.

We are extremely proud of what these researchers and the structural biology community have achieved.