|   Electron Microscopy Solutions

    
Electron Microscopy Solutions

Tungsten Deposition

Gas chemistry solution for Ion or Electron beam deposition of Tungsten-containing material.





Need more information?

Add to my Upgrades and Accessories List

Add Item and Request a Quote

Find another Accessory

Key Benefits:

  • Complete solution
  • Low resistivity pads and lines for device edit (Circuit Edit)
  • In case low electrical resistance of the deposited material is required
  • contacting very small structures
  • Gas flow control based on accurate temperature setting
  • Homogeneous temperature for full gas path
  • Local gas density fluctuations at sample < 6 % over a width of 100 um
  • Double container safety control
  • 100 % free of any cross-contamination
  • Instantaneous gas delivery
  • No gaseous precursors

Note:

The package includes the gas precursor, deposition enhancement gas, injection needle, gas injector system and controller.

Find More Items

My Upgrades & Accessories List

no items have been added