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The Gaseous Analytical solid-state, back-scattered electron detector has an X-ray cone with a 500 µm Pressure Limiting Aperture, and seals to the final lens.
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The X-ray cone extends the differential pumping zone to just above the sample surface, which provides the necessary gaseous analytical geometry for very small beam gas path lengths.
Microanalysis with the GAD backscattered detector in place drastically reduces the spurious beam skirt X-ray intensities by at least one order of magnitude compared to other low-vacuum SEMs.
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