Electron Microscopy Methods at the Convergence of Materials and Life Sciences
31st European Crystallographic Meeting
SPE ATCE 2018
SEG International Exposition and 88th Annual Meeting 2018
Gas chemistry solution for enhanced etching of polymer-based materials such as resist, polycarbonate or diamonds. It mounts on any of the available GIS ports.
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The package includes the gas precursor, deposition enhancement gas, injection needle, gas injector system and controller.
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