|   Electron Microscopy Solutions

    
Electron Microscopy Solutions

Selective Carbon Mill

Gas chemistry solution for enhanced etching of polymer-based materials such as resist, polycarbonate or diamonds. It mounts on any of the available GIS ports.





Need more information?

Add to my Upgrades and Accessories List

Add Item and Request a Quote

Find another Accessory

Key Benefits:

  • Complete solution
  • Mills carbon based species quickly and without damage
  • Acts as an etch stop on silicon
  • Resist milling with electron beam
  • Enhanced etching of polymer-based materials such as resist, polycarbonate or diamonds
  • Gas flow control based on accurate temperature setting
  • Homogeneous temperature for full gas path
  • Local gas density fluctuations at sample < 6 % over a width of 100 um
  • Double container safety control
  • 100 % free of any cross-contamination
  • Instantaneous gas delivery
  • No gaseous precursors

Notes:

The package includes the gas precursor, deposition enhancement gas, injection needle, gas injector system and controller.

Find More Items

My Upgrades & Accessories List

no items have been added