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Electron Microscopy Solutions

Platinum Deposition

Gas chemistry solution for Ion or Electron beam deposition of Platinum-containing material. Platinum gas chemistry is the preferred metal deposition in case ease of use, high deposition rate and precision of the deposition is required.





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Key Benefits:

  • Very hard: tougher for probing and thermal cycling
  • Chemically resistant
  • Use for Thin layer deposition e-beam, (TEM) Sample protection and Contacting very small structures
  • Use for Electrical conductivity - device edit, large area coating
  • Gas flow control based on accurate temperature setting
  • Homogeneous temperature for full gas path
  • Local gas density fluctuations at sample < 6 % over a width of 100 um
  • Double container safety control
  • 100 % free of any cross-contamination
  • Instantaneous gas delivery
  • No gaseous precursors

Notes:

The package includes the gas precursor, deposition enhancement gas, injection needle, gas injector system and controller.

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