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The gaseous back-scattered electron detector allows BSE imaging in ESEM™ mode, i.e. at high chamber pressures.
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Other back-scattered electron detectors such as solid-state or scintillator-type BSE detectors typically work with pressures up to 1 mbar, but tend to get very noisy at higher pressures. The gaseous BSE detector uses gas amplification to compensate signal loss at high chamber pressures.
The detector can be switched from BSE mode to SE mode, and the BSE and SE signals can be mixed. The detector control is software controlled. The integrated 500µm aperture allows maximum chamber pressures of 13 mbar (1300 Pa) with this detector, but limits the magnification to 250x at analytical working distance. EDX data can be collected with the GBSD detector mounted under the final lens.
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