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The Gaseous Analytical solid-state, back-scattered electron detector is similar to the standard low-kV, solid-state, back-scattered electron detector, but features an additional X-ray cone with a 500 micron Pressure Limiting Aperture which seals to the final lens.
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The cone extends the differential pumping zone to just above the sample surface, which provides the necessary gaseous analytical geometry for very small beam gas path lengths.
Microanalysis with the GAD backscattered detector in place drastically reduces the spurious beam skirt X-ray intensities by at least one order of magnitude compared to other low-vacuum SEMs.
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