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The Centaurus detector is a retractable, scintillator-type, back-scattered electron detector.
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Unlike the solid-state backscattered detectors, the Centaurus detector can be used at very high scan rates, where it behaves like the conventional SE detector. Due to its bulky nature, however, there is a tilt restriction depending on sample size and stage type, and beam gas path lengths typically are longer compared to the solid-state BSE or Gaseous Analytical solid-state BSED. The Centaurus detector with BSE tip can be converted into a cathodo-luminescence detector by fitting the optional CL tip.
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