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Channel Detection Electron Multiplier (CDEM) for direct ion imaging and ion-induced secondary electron imaging. The geometry of the detector is optimized for imaging with the ion column resulting in excellent Signal/Noise in ion imaging, as opposed to the Everhart Thornley SED which is optimized for S/N in electron imaging.
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The CDEM detector can be used in combination with the charge neutralizer providing ion imaging while the specimen is flooded with electrons to neutralize charge.
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