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Electron Microscopy Solutions

Nanodevices

Nanomaterials offer tremendous opportunity and challenges for researchers.  With unique optical, magnetic, electrical and mechanical properties - all occurring at the nanoscale - these materials have properties that can vary with length scale, changing continuously or instantly.

To correlate device performance to structure or design requires research solutions that offer a complete workflow, from CAD to prototyping to characterization, with the ability to work with length scales that can go as small as tens of nanometers. 

Leading MEMS and NEMS engineers are using FEI solutions to build functional devices and fully characterize their physical and mechanical properties. Using CAD data and the highest accuracy beam chemistries to precisely direct the prototyping process, researchers using FEI solutions are getting their devices to market faster, with greater cost efficiencies. 

Featured Product

Create functional prototypes using Helios G4 UX DualBeam

Helios G4 UX provides the capability for rapid, precise milling and deposition of the most varied and intricate 3D structures, with critical dimensions of less than 10 nm, including fabrication of multiple prototype structures written over a large area. FEI's NanoBuilder™ 2.0 lets you plan construction of multi-layer nanostructures and guides the patterning processes: focused ion beam (FIB) milling, gas-assisted FIB milling, FIB induced deposition and electron-induced deposition.

In addition to its prototyping capabilities, the Helios G4 UX will deliver the best nanoscale details over the widest range of working conditions. Whether operating at 30 kV in STEM mode to access structural information, or at 500 V to obtain charge-free, detailed information from the surface, it delivers well below 1 nm resolution. And with unsurpassed fast, precise and reliable milling and exceptional low voltage FIB performance, Helios G4 UX is proven to produce the best quality thin samples for atomic scale S/TEM or atom probe microscopy.

Learn more about Helios G4 UX or download the NanoBuilder 2.0  datasheet  for more information about our unique nanoprototyping toolset.

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Documents

Nanofabrication and rapid prototyping with DualBeam instruments

Focused ion beam (FIB) milling of patterns in any kind of material and the precise beam induced deposition of various materials in one single instrument are recognized as novel ways of true rapid prototyping. The capabilities to observe the patterning process live and to immediately image the resulting structures with high resolution offer unique control over the patterning process and provide an immediate feedback loop for the operator. Successful nanoprototyping requires dedicated strategies for the execution of pattern designs owing to the characteristics of the FIB-substrate interaction. The impact of different patterning strategies is illustrated in this application note and may serve as guideline for successful nanofabrication.

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Products for Nanodevices

Apreo SEM for Materials Science
The Apreo SEM's revolutionary compound lens design combines electrostatic and magnetic immersion technology to yield unprecedented resolution and signal selection. This makes the Apreo SEM the platform of choice for research on nanoparticles, catalysts, powders and nanodevices, without compromising on magnetic sample performance.
Talos F200X TEM for Materials Science
The Thermo Scientific™ Talos F200X scanning/transmission electron microscope combines outstanding high-resolution S/TEM and TEM imaging with industry-leading energy dispersive x-ray spectroscopy (EDS) signal detection and 3D chemical characterization with compositional mapping. The Talos F200X S/TEM allows for the fastest and most precise EDS analysis in all dimensions (1D-4D), along with the best HRTEM imaging with fast navigation for dynamic microscopy. Talos F200X S/TEM does all this while also providing the highest stability and longest uptime.
Talos L120C TEM for Materials Science

The Thermo Scientific Talos L120C TEM is a 20-120 kV thermionic (scanning) transmission electron microscope uniquely designed for performance and productivity across a wide range of samples and applications, such as 2D and 3D imaging of cells, cell organelles, asbestos, polymers, and soft materials, both at ambient and cryogenic temperatures. The Talos L120C TEM is designed from the ground up to allow users at any skill level to acquire high-quality results with minimal effort. Fast, sophisticated automation and advanced 3D imaging workflows allow applied researchers to focus on scientific questions rather than microscope operation.

Talos Arctica TEM for Life Sciences
The Thermo Scientific™ Talos™ Arctica is a 200kV FEG Transmission and Scanning Electron Microscope (S/TEM). It is a powerful, stable, and versatile system for delivering high-resolution 3D characterization of biological and biomaterials samples in cell biology, structural biology, and nanotechnology research. The Talos S/TEM enables scientists to quickly obtain better insight and understanding of macromolecular structures, cellular components, cells, and tissues in three dimensions.
Talos F200C TEM for Life Sciences
The Thermo Scientific™ Talos™ is a 200kV S/TEM designed for fast, precise and quantitative characterization of nanomaterials in multiple dimensions. It accelerates materials nanoanalysis based on higher data quality, faster acquisition, simplified, easy and automated operation.
Talos F200S TEM for Materials Science
The Thermo Scientific™ Talos™ F200S scanning/transmission electron microscope (S/TEM) combines outstanding high-resolution S/TEM and TEM imaging with industry-leading energy dispersive x-ray spectroscopy (EDS). The Talos F200S S/TEM features the greatest versatility and the highest throughput in STEM imaging. It allows for the most precise EDS analysis and the best HRTEM for dynamic microscopy. Talos F200S S/TEM does all this while also providing the highest stability and longest uptime.
Themis Z S/TEM for Materials Science
Thermo Scientific's aberration-corrected Themis Z scanning transmission electron microscope (S/TEM) combine's proven optics and new, breakthrough S/TEM imaging capability with enhanced automation software to put the ultimate imaging performance in the hands of all materials scientists. Complimented by our unique EDX portfolio the Themis Z S/TEM delivers the best all round atomic characterisation data in a single tool with a single objective lens configuration
Helios PFIB DualBeam for Semiconductors
The FEI Helios PFIB DualBeam™ is the world's most advanced DualBeam Plasma FIB platform for large area deprocessing to enable electrical fault isolation of advanced process ICs and advanced failure analysis of 3D packages.
Helios G4 CX DualBeam for Materials Science
The latest technological innovations of the FEI Helios G4 CX DualBeam™ microscope, in combination with the easiest to use, most comprehensive software and FEI's application expertise, allow Helios G4 CX with optional AS&V4 software for the highest-quality, fully automated acquisition of multi-modal 3D datasets.
Helios G4 UX DualBeam for Materials Science
The latest technological innovations of the FEI Helios G4 DualBeam™ microscope, in combination with the easiest to use, most comprehensive software and FEI's application expertise, allow for the fastest and easiest preparation of site-specific, ultra-thin HR-S/TEM samples for a wide range of materials.
Helios G4 FX DualBeam for Materials Science
The Helios G4 FX DualBeam™ microscope is the world's first DualBeam™ to incorporate a TEM-like CompuStage for TEM lamella sample preparation and combine it with an all-new in-lens STEM 4 detector to drastically reduce the time to high-quality, useable data.
Quanta SEM for Materials Science
The Quanta™ 50 SEM series is the third generation Quanta system built on the success of previous generations of ESEM™ Schottky FEG. This series has an easy-to-use and flexible user interface with functions to maximize productivity and allow all the data to be collected. Designed by microscopists for microscopists, this instrument series is truly above and beyond 'easy to use'.
Q250 Analytical SEM for Materials Science

The Q250 scanning electron microscope (SEM) addresses your need to investigate a wide variety of materials while characterizing their structure and composition. Surface and compositional images combined with elemental data from the UltraDry™ EDS detector provide a high-throughput data analysis solution for labs with versatile research needs. 

Scios 2 DualBeam for Materials Science

The Thermo Scientific™ Scios™ 2 DualBeam™ is an ultra-high-resolution analytical FIB-SEM system that provides outstanding sample preparation and 3D characterization performance for the widest range of samples, including magnetic and non-conductive materials. 

Verios G4 XHR SEM for Materials Science
The Thermo Scientific™ Verios G4 SEM is the second generation of our leading XHR SEM family, offering accurate imaging with sub-nanometer resolution from 1 to 30 kV energy range. It provides the excellent contrast needed for precise measurements on materials in a variety of applications without compromising the high throughput, analytical capabilities, sample flexibility, and ease of a traditional SEM.
Vion Plasma Focused Ion Beam for Materials Science
The Vion Plasma FIB is an instrument capable of highly precise high-speed cutting and milling. It has the ability to selectively mill areas of interest. In addition, the Plasma FIB can selectively deposit patterned conductors and insulators.
HeliScan microCT for Materials Science
Thermo Scientific HeliScan™ brings a new era of microCT to Materials Science by leveraging advanced helical scanning and iterative reconstruction technology to produce unsurpassed image fidelity. As part of a multi-scale imaging solution, HeliScan enables scientists to gain valuable insight from internal structures to explore and validate a wide range of material properties.

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