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The Transmission Electron Microscope

There are four main components to a transmission electron microscope (TEM): an electron optical column, a vacuum system, the necessary electronics (lens supplies for focusing and deflecting the beam and the high voltage generator for the electron source), and control software. A modern TEM typically comprises an operating console surmounted by a vertical column and containing the vacuum system, and control panels conveniently placed for the operator. The microscope may be fully enclosed to reduce interference from environmental sources, and operated remotely.

TEM microscopy

The electron column includes elements analogous to those of a light microscope. The light source of the light microscope is replaced by an electron gun, which is built into the column. The glass lenses are replaced by electromagnetic lenses. Unlike glass lenses, the power (focal length) of magnetic lenses can be changed by changing the current through the lens coil. The eyepiece or ocular is replaced by a fluorescent screen and/or a digital camera. The electron beam emerges from the electron gun, and passes through a thin specimen, transmitting electrons which are collected, focused, and projected onto the viewing device at the bottom of the column. The entire electron path from gun to camera must be under vacuum.

Aberration-corrected transmission electron microscopy

The recent development of a dedicated commercial aberration-corrected TEM has enabled major advances in TEM capability. Without correction, TEM resolution is limited primarily by spherical aberration, resulting in a general blurring of the image, but also in a phenomenon called delocalization, in which periodic structures appear to extend beyond their actual physical boundaries. The ability to correct spherical aberration leaves the reduction or correction of the effects of chromatic aberration as the next major challenge in improving TEM performance. Chromatic aberration correctors have been successfully incorporated into the FEI Titan™ TEM platform, but their design and operation are substantially more complex than spherical aberration correctors.

Environmental transmission electron microscopy

An environmental TEM (ETEM), such as FEI's Titan ETEM, uses a specially designed vacuum system to allow researchers to observe specimens in a range of conditions approaching more "natural" environments, with gas pressures in the sample chamber as high as a few percent of atmospheric pressure. This is important for observing interactions between the sample and the environment. ETEM relies on pressure-limiting apertures and differential vacuum pumping to permit less restrictive vacuum conditions in the vicinity of the sample while maintaining high vacuum in the rest of the electron column.

Next: The Scanning Electron Microscope (SEM)

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Electron Density

A typical electron beam has a current of about 10 picoamperes (1 pA = 10-12 A). One ampere is 1 coulomb/sec. The electron has a charge of 1.6 x 10-19 coulomb. Therefore, approximately 60 million electrons per second impinge on the specimen. However, because of their high speed, the average distance between electrons (at 200,000 km/ second) would be over three meters. Most electrons transit the specimen one at a time.

Vacuum

Normal atmospheric air pressure is around 760 mm of mercury. Normal air pressure = 1 bar = 1000 mbar = 100 000 Pa = 760 torr = 760 mm of Hg. Typical residual pressure in an electron microscope = 2.5 x 10-5 Pa. At this pressure, the number of gas molecules per liter is about 7 x 10-12, and the chance of an electron striking a gas molecule while traversing the column is almost zero.

Diffraction

When a wave passes through a periodic structure whose periodicity is of the same order of magnitude as the wavelength, the emerging wave is subject to interference, which produces a pattern beyond the object. Electrons can be diffracted by a crystal, and the pattern of spots on the screen of the microscope gives information about the crystal lattice (shape, orientation, and spacing of the lattice planes).

3D Imaging

Understanding the organization of matter in three dimensions has become increasingly important. Semiconductor manufacturers routinely create nanometer scale structures that they must be able to see and measure in order to control their manufacturing processes. Perhaps the most important application of 3D microscopy is in biological sciences where investigators are unraveling the complex molecular interactions that are the basis of life, most of which depend directly upon the intricate three-dimensional shapes of the interacting molecules.

Downloads

Links

> The Transmission Electron Microscope from Nobelprize.org

>Titan: The World's Most Powerful TEM

> YouTube Video: Operating the FEI Tecnai F-20 TEM - Univ. of Washington


> KQED Video: The World's Most Powerful Microscope