FEI offers a range of advanced scanning electron microscopes (SEM) to meet user-specific requirements. An FEI scanning electron microscope can scan the surface of a sample with a finely focused electron beam to produce an image from the beam-specimen interactions detected by a wide array of detectors. There are a wide range of detectors from secondary electron detectors to give surface information to backscattered detectors for compositional information that work in high or low vacuum modes. Accessories such as energy dispersive spectrometry (EDS), wavelength dispersive spectrometry (WDS) and electron backscattered diffraction (EBSD) can also be added to any FEI SEM to enable chemical data collection. All systems can also accommodate cryo stages to look at frozen materials and some can accommodate hot or cold stages for watching dynamic experiments.
Three FEI product families offer SEM systems:
The Inspect Family of tools includes two scanning electron microscopes, one with tungsten and one with FEG, for use where high-resolution imaging is routine. These cost-effective, flexible, state-of-the-art scanning electron microscopes are built using FEI’s advanced technology, making them valuable for industrial manufacturers and researchers working with material characterization and inspection applications. These systems can accommodate cryo stages, EDS, WDS and EBSD and are flexible, solid performers. The tungsten Inspect S [PDF 162KB] has both high and low vacuum modes standard and is ideal for routine analysis. The Inspect F [PDF 165KB] is a high current FEG SEM meeting the needs for solid analytical performance and reliability. These instruments are well suited for research, quality and inspection activities.
Three quality nanoscale research tools comprise the Nova family of scanning electron microscopes, including the Nova NanoSEM 200 [PDF 168KB], the Nova NanoSEM 400 [PDF 168KB] and the Nova NanoSEM 600 [PDF 168KB]. All Nova scanning electron microscopes include low-vacuum capability, and are ideal for the diverse imaging, analytical and sample preparation demands found in research labs, semiconductor and data storage labs and fabs, biology and life sciences labs and other industries. Nova systems can accommodate EBIC, cryo stages, STEM, EDS, WDS and EBSD.
The Quanta family of tools, including three scanning electron microscope models with field emission gun (FEG/SEM) capability, are versatile, high-performance scanning electron microscopes (SEM), with three modes (high-vacuum, low-vacuum and ESEM) to accommodate the widest range of samples of any SEM system. The Quanta 200, 400, and 600, along with their FEG-enabled models, are the ideal scanning electron microscopes for industrial process control labs, materials science labs and life science labs. The Quanta family contains the most versatile SEM systems on the market today and are flexible enough for use in many multi-use "core" facilities worldwide. Quanta systems can accommodate EBIC, cryo stages, cold stages, hot stages, STEM, WetSTEM, EDS, WDS, EBSD and other detectors for a truly versatile SEM platform.