Contact Us Locations | FEI 中国 (FEI Chinese) FEI日本 (FEI Japan) Welcome to FEI [ Register ] [ ]
Loading...

Quanta™ Scanning Electron Microscope

Quanta 250 FEG Scanning Electron Microscope
The FEI Quanta™ line includes six variable-pressure and environmental scanning electron microscopes (ESEM™) and two DualBeam™ systems, all of which can accommodate multiple sample and imaging requirements for industrial process control labs, materials science labs and life science labs.
Loading...

The Quanta line of scanning electron microscopes  are versatile, high-performance instruments with three modes (high vacuum, low vacuum and ESEM) to accommodate the widest range of samples of any SEM system. All the Quanta SEM systems can be equipped with analytical systems, such as energy dispersive spectrometer, wavelength dispersive x-ray spectroscopy and electron backscatter diffraction. In addition, the field emission gun (FEG) systems contain a S/TEM detector for bright-field and dark-field sample imaging. Another variable that changes amongst the SEM systems is the size of the motorized stage (50mm, 100mm, and 150mm) and the motorized z-range (25mm, 60mm, and 65mm, respectively). The Quanta 650 and 650 FEG are each designed with a roomy chamber, enabling the analysis and navigation of large specimens.

The Quanta SEM line now includes even more flexibility with the release of the Quanta 50 Series. These new instruments, the Quanta 250 , 450 , 650 , and 650 FEG address the need to investigate a wide variety of materials and characterize structure and composition. The FEI Quanta™ 50 series provides flexibility and versatility to handle the challenges of today's wide ranging research needs. View any sample and get all the data - surface and compositional images can be combined with accessories for determining material properties and elemental composition. The Quanta 650 also serves as the platform for FEI's complete solutions for natural resources, featuring QEMSCAN and MLA.  Learn more about our natural resource solutions at our dedicated microsite, fei-natural-resources.com

Quanta 50 Series Scanning Electron Microscopes
Quanta 50 Series
The Quanta 50 series adds new features such as SmartSCAN™, Multiple Image Saving and a scan preset toolbar to the easy to use control software. In addition, new features are available like the Nav-Cam™ (color sample camera), Beam Deceleration (low kV performance) and New detector options.
Quanta Morphologi Scanning Electron Microscopes
Quanta Morphologi
Quanta Morphologi combines the magnification and resolving power of the FEI Quanta 250 FEG scanning electron microscope (SEM) with established particle analysis software from Malvern Instruments to provide a turn-key solution for particle characterization. As opposed to indirect particle size analysis techniques, which report equivalent spherical diameter, Quanta Morphologi is a direct method to report both size and shape information.


Loading...
  Resolution Accelerating
Voltage
Probe Current stage Magnification Chamber Size
Quanta 50 Series 
Quanta 250
 
Quanta 450
 
Quanta 650
 

• High vacuum
- 3.0 nm at 30 kV (SE)
- 4.0 nm at 30 kV (BSE)
- 10.0 nm at 3 kV (SE)
• High vacuum with beam deceleration option
- 6.2 nm at 3 kV
(BD mode* + vCD*)
• Low vacuum
- 3.0 nm at 30 kV (SE)
- 4.0 nm at 30k V (BSE)
- 10 nm at 3 kV (SE)
• Extended vacuum
mode (ESEM)
- 3.0 nm at 30 kV (SE)

200 V
to 30 kV
up to 2 μA,
continuously
adjustable
20 to 1000000
x (quad view)
284mm-379mm
inner diameter left to right
Quanta 50 FEG Series 
Quanta 250 FEG
 
Quanta 450 FEG
 
Quanta 650 FEG
 
• High vacuum
- 0.8 nm at 30 kV (STEM)*
- 1.0 nm at 30 kV (SE)
- 2.5 nm at 30 kV (BSE) - 3.0 nm at 1 kV (SE)
• High vacuum with beam deceleration option
- 3.0 nm at 1 kV (BD mode* + BSE)
- 2.3 nm at 1 kV (BD mode* + ICD*)
- 3.1 nm at 200 V (BD mode* + ICD*)
• Low vacuum - 1.4 nm at 30 kV (SE)
- 2.5 nm at 30 kV (BSE)
- 3.0 nm at 3 kV (SE)
• Extended vacuum mode (ESEM)
- 1.4 nm at 30 kV (SE)
200 V
to 30 kV
up to 2 μA,
continuously
adjustable
20 to 1000000
x (quad view)
284mm-379mm
inner diameter left to right

Upgrades & Accessories

1 - 10 of 34
1 2 3 4 

1000 °C Heating Stage

Works With: Quanta 200(FEG), 250(FEG), 400(FEG), 450(FEG), 600(FEG), 650(FEG), Quanta 3D/3D(FEG) and Versa 3D (with ESEM option)
The 1000 °C heating stage is used to heat samples and record in-situ morphological sample changes.

1500 ºC Heating Stage

Works With: Quanta 250(FEG), 450(FEG) and 650(FEG), Quanta 3D FEG and Versa 3D
The 1500 ºC heating stage is the total heating solution to record in-situ morphological sample changes during heating up to 1500 ºC.

Acoustic Enclosure

Works With: Almost every SEM and Small DualBeam
The acoustic enclosure is a cover that fits the various pump(s) of the microscope system. It provides noise dampening of the pump(s) for operator and microscope. Check which enclosures we have available for your instrument.

Additional Wehnelt

Works With: Scanning Electron Microscopes non FEG
The additional Wehnelt cartridge may be used to minimize system downtime during filament replacement. The cartridges are pre-centered, and normally no column alignments are necessary after cartridge replacement.

Ballistic Sub-stage

Works With: Quanta 400 (FEG) and Quanta 600 (FEG)
This optional stage extends the capabilities of the forensic SEM to compare bullet cartridges. Cartridges can be rotated along vertical or horizontal rotation axes. Due to the height of common cartridges and restricted clearance, this accessory is not compatible with the small chamber SEM.

Cathodoluminescence Tip for Centaurus Detector

Works With:
By exchange of the detector tip, this option enables the Centaurus detector with backscatter tip to be converted to a cathodoluminescence detector.

Centaurus Detector with Back-scatter Tip

Works With: Q200 (FEG), 400 (FEG), Q600 (FEG) and XL-series
The Centaurus detector is a retractable, scintillator-type, back-scattered electron detector.

Cryo Can

Works With: All SEM and DualBeam instruments, except full wafer systems
The Cryo Can decontamination device for the SEM/SDB helps to reduce contamination found in the specimen chamber created by sample out-gassing and other sources common to SEM/SDB.

CryoMAT

Works With: Quanta™ 250, 450 and 650; Quanta 200, 400 and 600 (MK2 only); Quanta FEG 250, 450 and 650 • Quanta FEG 200, 400 and 600; Nova™ NanoLab 200, 600 and 600(i); Helios NanoLab™ 600; Quanta 3D 200i; Quanta 3D FEG and Versa 3D
The CryoMAT is a materials-dedicated, cryogenic upgrade to Quick Loader (loadlock system for SEM and DualBeam) and meets the demand for easier and more practical operation than a generic full cryo transfer system.

EDX detectors on SEM

Works With: All Scanning Electron Microscopes
On every FEI microscope a wide range of EDX detectors can be operated. i.e. from suppliers like Oxford, Bruker and Edax. FEI’s special integration kits prepare your SEM support computer to control the EDX. The required connection cards and kits are supplied by FEI together with the EDX solution selected.
Contact Sales

More SEMs:

Loading...

National Semiconductor Failure Analysis Lab

National Semi - Quanta SEM-120

Low-vacuum SEM saves time, gets data faster

National Semiconductor’s premier failure analysis lab relies on FEI’s Quanta™ SEM for quick sample inspection and characterization.

Read the case study