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Quanta™ Scanning Electron Microscope

Quanta 250 FEG Scanning Electron Microscope
The FEI Quanta™ line includes six variable-pressure and environmental scanning electron microscopes (ESEM™) and two DualBeam™ systems, all of which can accommodate multiple sample and imaging requirements for industrial process control labs, materials science labs and life science labs.
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The Quanta line of scanning electron microscopes  are versatile, high-performance instruments with three modes (high vacuum, low vacuum and ESEM) to accommodate the widest range of samples of any SEM system. All the Quanta SEM systems can be equipped with analytical systems, such as energy dispersive spectrometer, wavelength dispersive x-ray spectroscopy and electron backscatter diffraction. In addition, the field emission gun (FEG) systems contain a S/TEM detector for bright-field and dark-field sample imaging. Another variable that changes amongst the SEM systems is the size of the motorized stage (50mm, 100mm, and 150mm) and the motorized z-range (25mm, 60mm, and 65mm, respectively). The Quanta 650 and 650 FEG are each designed with a roomy chamber, enabling the analysis and navigation of large specimens.

The Quanta SEM line now includes even more flexibility with the release of the Quanta 50 Series. These new instruments, the Quanta 250 , 450 , 650 , and 650 FEG address the need to investigate a wide variety of materials and characterize structure and composition. The FEI Quanta™ 50 series provides flexibility and versatility to handle the challenges of today's wide ranging research needs. View any sample and get all the data - surface and compositional images can be combined with accessories for determining material properties and elemental composition.

Quanta 50 Series Scanning Electron Microscopes
Quanta 50 Series
The Quanta 50 series adds new features such as SmartSCAN™, Multiple Image Saving and a scan preset toolbar to the easy to use control software. In addition, new features are available like the Nav-Cam™ (color sample camera), Beam Deceleration (low kV performance) and New detector options.
Quanta Morphologi Scanning Electron Microscopes
Quanta Morphologi
Quanta Morphologi combines the magnification and resolving power of the FEI Quanta 250 FEG scanning electron microscope (SEM) with established particle analysis software from Malvern Instruments to provide a turn-key solution for particle characterization. As opposed to indirect particle size analysis techniques, which report equivalent spherical diameter, Quanta Morphologi is a direct method to report both size and shape information.


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Quanta 50 Series
Quanta 250, 450, and 650

Resolution Accelerating Voltage
• High vacuum
- 3.0 nm at 30 kV (SE)
- 4.0 nm at 30 kV (BSE)
- 10.0 nm at 3 kV (SE)
• High vacuum with beam deceleration option
- 6.2 nm at 3 kV (BD mode* + vCD*)
• Low vacuum
- 3.0 nm at 30 kV (SE)
- 4.0 nm at 30k V (BSE)
- 10 nm at 3 kV (SE)
• Extended vacuum mode (ESEM)
- 3.0 nm at 30 kV (SE)
200 V to 30 kV
Probe Current
up to 2 μA, continuously adjustable
Magnification
20 to 1000000 x (quad view)
Chamber Size
284mm-379mm inner diameter left to right


Registered members of fei.com can download the Quanta 50 Series datasheets below:

Quanta 250 SEM 
Quanta 450 SEM 
Quanta 650 SEM 

Register now for access to product datasheets and other premium content in the FEI NanoCenter.


Quanta 50 FEG Series
Quanta 250 FEG, 450 FEG, and 650 FEG

Resolution Accelerating Voltage
• High vacuum
- 0.8 nm at 30 kV (STEM)*
- 1.0 nm at 30 kV (SE)
- 2.5 nm at 30 kV (BSE)
- 3.0 nm at 1 kV (SE)
• High vacuum with beam deceleration option
- 3.0 nm at 1 kV (BD mode* + BSE)
- 2.3 nm at 1 kV (BD mode* + ICD*)
- 3.1 nm at 200 V (BD mode* + ICD*)
• Low vacuum
- 1.4 nm at 30 kV (SE)
- 2.5 nm at 30 kV (BSE)
- 3.0 nm at 3 kV (SE)
• Extended vacuum mode (ESEM)
- 1.4 nm at 30 kV (SE)
200 V to 30 kV
Probe Current
up to 2 μA, continuously adjustable
Magnification
20 to 1000000 x (quad view)
Chamber Size
284mm-379mm inner diameter left to right

 

Registered members of fei.com can download the Quanta 50 FEG Series datasheets below:

Quanta 250 FEG SEM 
Quanta 450 FEG SEM 
Quanta 650 FEG SEM 

Register now for access to product datasheets and other premium content in the FEI NanoCenter.

Life Sciences
Electronics
Research
Industry
  • Gun Shot Residue (GSR)
  • Pharmaceutical Formulations R&D
  • Metallurgical Research
  • Quality Control & Failure Analysis
  • Solar Photovoltaics R&D and Quality Control
  • Crime Scene Sample Analysis

Upgrades & Accessories

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New Item
Featured Item

1000 °C Heating Stage

Works With: Quanta 200(FEG), 400(FEG) and 600(FEG) and Quanta 3D(FEG)
The 1000 °C heating stage is used to heat samples and record in-situ morphological sample changes.
Featured Item

Ballistic Sub-stage

Works With: Quanta 400 (FEG) and Quanta 600 (FEG)
This optional stage extends the capabilities of the forensic SEM to compare bullet cartridges. Cartridges can be rotated along vertical or horizontal rotation axes. Due to the height of common cartridges and restricted clearance, this accessory is not compatible with the small chamber SEM.
Featured Item

Cathodoluminescence Tip for Centaurus Detector

Works With:
By exchange of the detector tip, this option enables the Centaurus detector with backscatter tip to be converted to a cathodoluminescence detector.
Featured Item

Centaurus Detector with Back-scatter Tip

Works With: Q200 (FEG), 400 (FEG), Q600 (FEG) and XL-series
The Centaurus detector is a retractable, scintillator-type, back-scattered electron detector.
Featured Item

Cryo Can

Works With: All SEM's and Small DualBeam's
The Cryo Can decontamination device for the SEM/SDB helps to reduce contamination found in the specimen chamber created by sample out-gassing and other sources common to SEM/SDB.
Featured Item

EDX detectors on SEM

Works With: All Scanning Electron Microscopes
On every FEI microscope a wide range of EDX detectors can be operated. i.e. from suppliers like Oxford, Bruker and Edax. FEI’s special integration kits prepare your SEM support computer to control the EDX. The required connection cards and kits are supplied by FEI together with the EDX solution selected.
Featured Item

Electrostatic Beam Blanker

Works With: Almost every SEM and Small DualBeam as long if the E-beam column contains a spare port just below the Final Lens Aperture mechanism.
The Electrostatic Beam Blanker is an essential tool for Lithography applications on SEM and Small DualBeam. This option will blank the Electron Beam when an external blanking voltage is applied.
Featured Item

Forensic Completion Package

Works With: Inspect S and Quanta 200(FEG), 400(FEG) and 600(FEG)
The forensic completion package is a set of SEM and EDS accessories that complement the basic microscope to define a preferred configuration for forensic applications.
Featured Item

SIS Scandium Image Software

Works With: All SEM's and Small DualBeam's
This software package is an FEI-customized version of SIS Scandium basic package. It allows for direct extraction of SEM/FIB images into the SIS application.
Featured Item

Solid-state STEM Detector

Works With: Nova NanoSEM, Quanta 3D (FEG) Family and Nova NanoLab 600, Strata 400, Q200 (FEG), Q400 (FEG), Q600 (FEG) and Inspect F
Two-segment solid-state STEM detector for high-resolution bright and dark field imaging of FIB-prepared cross sections and critical dimension measurements. The STEM detector is designed to hold up to eight FIB-prepared grids placed on copper-grid supported carbon film.
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National Semiconductor Failure Analysis Lab

National Semi - Quanta SEM-120

Low-vacuum SEM saves time, gets data faster

National Semiconductor’s premier failure analysis lab relies on FEI’s Quanta™ SEM for quick sample inspection and characterization.

Read the case study