Nova NanoSEM 50 Series
With the Nova NanoSEM 50 series, even more becomes possible. In addition to the powerful combination of advanced optics (including a two-mode final lens), SE/BSE (Secondary Electrons/Backscattered Electrons) in-lens detection and beam deceleration, the Nova NanoSEM 50 series introduces a new suite of latest generation, high sensitivity retractable
SE/BSE and STEM detectors, as well as versatile SE/BSE filtering capabilities, to best optimize the information of interest. Intelligent scanning modes are available to minimize imaging artefacts. Sample cleanliness, critical for low kV high resolution imaging, is maintained using FEI’s integrated solutions for keeping the sample surface free from hydrocarbon contamination. There are improvements for analysis too, with up to 200 nA of beam current and a large motorized tilt stage on the Nova NanoSEM 450. And all this without compromising the Nova NanoSEM’s high resolution performance.
Features
- Field emission SEM with ultra-stable, high current Schottky gun
- Advanced optics and detection, including immersion mode, beam deceleration, in-lens TLD-SE and -BSE, DBS and STEM for best selection of the information and image optimization
- Beam landing energy down to 50 V
- 1.4 nm @ 1 kV without beam deceleration
- World’s only true high resolution low vacuum FESEM : 1.8 nm @ 3 kV and 30 Pa
- Up to 200 nA for analysis in high or low vacuum
- Integrated 16-bit scanning/patterning engine
Key Specifications
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Resolution high vacuum
|
15 kV (TLD)
1 kV (TLD, no BD)
100 V (DBS)
15 kV, 5 nA
|
1.0 nm
1.4 nm
3.5 nm
3.0 nm |
| Resolution low vacuum |
3 kV and 30 Pa (Helix) |
1.8 nm |
| Beam Current |
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Up to 200 nA |
| Landing voltage range |
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50 V to 30 kV |
| Stage |
X x Y x Z (mm) |
110 x 110 x 25
150 x 150 x 10 |
| Chamber |
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Large chamber |
| Detection |
In-lens
Below the lens, large angle detector |
TLD SE and BSE
High sensitivity DBS (SE/BSE) |
| |
STEM |
STEM-III (BF DF HAADF) |
| Navigation |
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NavCam, Correlative Navigation Unit |
| Cleanliness management |
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FEI integrated plasma cleaner, CryoCleaner |
| Imaging |
Scan engine |
PIA 16 bit |
| |
Scan strategies |
Smartscan, DCFI |
| Loadlock |
|
Yes (QuickLoader) |
User interface
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Aligned with Magellan XHR SEM |
Download the Datasheet to get all of the specifications.
Application Images
Spectacular results are consistently obtained on a variety of challenging materials, in particular nanoparticles and powders, nanotubes and nanowires, plastic electronics, glass substrates, organic materials, diamond films and more. Easy to use, extremely versatile with respect to the sample or information sought, the Nova NanoSEM 50 Series is the perfect solution for the most demanding characterization and analysis needs at the nanoscale.