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Inspect™ Scanning Electron Microscope

Inspect F Scanning Electron Microscope (SEM)
With advanced chamber vacuum technology, the Inspect line of scanning electron microscopes (SEM) builds on FEI’s world-class electron optics and sample throughput technologies. When inspection, characterization, process control and failure analysis are important, the Inspect S50 and Inspect F50 models’ high-resolution imaging is a must. The intuitive user interface and software, with all functions required to record and store an image accessed directly via a tool bar, is well suited for a multi-user environment while full stage access to accommodate a range of specimen holders adds value and flexibility for a range of uses.
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The Inspect™ line of tools includes two scanning electron microscopes , one SEM with tungsten and another SEM with FEG, for use where high-resolution imaging is routine. These cost-effective, flexible, state-of-the-art scanning electron microscopes are built using FEI’s advanced technology, making them valuable for industrial manufacturers and researchers working with material characterization and inspection applications. These systems can accommodate cryo stages, EDS, WDS and EBSD and are flexible, solid performers. The tungsten Inspect S has both high and low vacuum modes standard and is ideal for routine analysis. The Inspect F is a high current FEG SEM meeting the needs for solid analytical performance and reliability. These instruments are well suited for research, quality and inspection activities.

The Inspect S50  is the industry's leading low-vacuum scanning electron microscope (SEM) platform with high-resolution capabilities using thermal emission electron optics. While the low-vacuum settings are particularly useful for inspection and characterization of non-conductive and heavily contaminated materials, the system also minimizes sample preparation complexity for charge-free imaging and analysis. The Inspect S also has significant high-vacuum resolution that enhances its flexibility and ability to work with diverse sample types and a wide range of throughput.

For high-brightness, high-current, high-resolution imaging, the Inspect F50 , a SEM equipped with a Schottky Field Emission source, provides clear, sharp and noise-free imaging. In combination with the optimized analytical chamber geometry and its four-axis, motorized tilt, eucentric specimen stage, the high- and stable beam current makes this tool well suited for (automated) short- and long-time EDS, WDS and EBSD analysis and mapping. The system's excellent lateral resolution enables easy detection of low-Z elements at low beam energies, adding value and flexibility to the Inspect F50.

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  Resolution Accelerating Voltage Probe Current
Inspect S 

• High-vacuum
- 3.0nm at 30kV (SE)
- 8.0nm at 3kV (SE)
- 4.0nm at 30kV (BSE)

• Low-vacuum
- 3.0nm at 30kV (SE)
- 4.0nm at 30kV (BSE)
- 10nm at 3kV (SE)

200V – 30kV up to 2μA – continuously adjustable
Inspect F  • High-vacuum
- 0.8nm at 30kV (STEM) *
- 1.0nm at 30kV (SE)
- 2.5nm at 30kV (BSE) *
- 3.0nm at 1kV (SE)
200V – 30kV up to 2μA – continuously adjustable

Upgrades & Accessories

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Quanta FEG SEM platform upgrade

Works With: Quanta 200(FEG), 250(FEG), 400(FEG), 450(FEG), 600(FEG), 650(FEG), (MK2 only), Inspect F, Inspect F50
The upgrade package offers more robust software, updated PC hardware and a variety of detectors and applications to optimize instrument performance.
New Item
Featured Item

Quanta Tungsten SEM platform upgrade

Works With: Quanta™ 250, 450 and 650; Quanta 200, 400 and 600 (MK2 only), Inspect S, Inspect S50
The upgrade package offers more robust software, updated PC hardware and a variety of detectors and applications to optimize instrument performance.

Acoustic Enclosure

Works With: Almost every SEM and Small DualBeam
The acoustic enclosure is a cover that fits the various pump(s) of the microscope system. It provides noise dampening of the pump(s) for operator and microscope. Check which enclosures we have available for your instrument.

Additional Wehnelt

Works With: Scanning Electron Microscopes non FEG
The additional Wehnelt cartridge may be used to minimize system downtime during filament replacement. The cartridges are pre-centered, and normally no column alignments are necessary after cartridge replacement.

CCD IR Inspection Camera

Works With: Inspect Family and Quanta 3D
The CCD camera is mounted below the chamber which provides visual feedback from inside the chamber.

CryoCleaner Extended Capacity

Works With: All SEM and DualBeam instruments, except full wafer systems
The CryoCleanerEC decontamination device for the SEM/SDB helps to reduce contamination found in the specimen chamber created by sample out-gassing and other sources common to SEM/SDB.

CryoMAT

Works With: Quanta™ 250, 450 and 650; Quanta 200, 400 and 600 (MK2 only); Quanta FEG 250, 450 and 650 • Quanta FEG 200, 400 and 600; Nova™ NanoLab 200, 600 and 600(i); Helios NanoLab™ 600; Quanta 3D 200i; Quanta 3D FEG and Versa 3D
The CryoMAT is a materials-dedicated, cryogenic upgrade to Quick Loader (loadlock system for SEM and DualBeam) and meets the demand for easier and more practical operation than a generic full cryo transfer system.

Electrostatic Beam Blanker

Works With: Almost every SEM and DualBeam as long if the E-beam column contains a spare port just below the Final Lens Aperture mechanism.
The Electrostatic Beam Blanker is an essential tool for Lithography applications on SEM and Small DualBeam. This option will blank the Electron Beam when an external blanking voltage is applied.

Forensic Completion Package

Works With: Inspect S and Quanta 200(FEG), 400(FEG) and 600(FEG)
The forensic completion package is a set of SEM and EDS accessories that complement the basic microscope to define a preferred configuration for forensic applications.

GAD Low-kV, Solid-State, Back-Scattered Electron Detector

Works With: Quanta 200(FEG), 400(FEG) and 600(FEG) and Inspect S
The Gaseous Analytical solid-state, back-scattered electron detector is similar to the standard low-kV, solid-state, back-scattered electron detector, but features an additional X-ray cone with a 500 micron Pressure Limiting Aperture which seals to the final lens.
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