The Inspect™ line of tools includes two scanning electron microscopes , one SEM with tungsten and another SEM with FEG, for use where high-resolution imaging is routine. These cost-effective, flexible, state-of-the-art scanning electron microscopes are built using FEI’s advanced technology, making them valuable for industrial manufacturers and researchers working with material characterization and inspection applications. These systems can accommodate cryo stages, EDS, WDS and EBSD and are flexible, solid performers. The tungsten Inspect S has both high and low vacuum modes standard and is ideal for routine analysis. The Inspect F is a high current FEG SEM meeting the needs for solid analytical performance and reliability. These instruments are well suited for research, quality and inspection activities.
The Inspect S50 is the industry's leading low-vacuum scanning electron microscope (SEM) platform with high-resolution capabilities using thermal emission electron optics. While the low-vacuum settings are particularly useful for inspection and characterization of non-conductive and heavily contaminated materials, the system also minimizes sample preparation complexity for charge-free imaging and analysis. The Inspect S also has significant high-vacuum resolution that enhances its flexibility and ability to work with diverse sample types and a wide range of throughput.
For high-brightness, high-current, high-resolution imaging, the Inspect F50 , a SEM equipped with a Schottky Field Emission source, provides clear, sharp and noise-free imaging. In combination with the optimized analytical chamber geometry and its four-axis, motorized tilt, eucentric specimen stage, the high- and stable beam current makes this tool well suited for (automated) short- and long-time EDS, WDS and EBSD analysis and mapping. The system's excellent lateral resolution enables easy detection of low-Z elements at low beam energies, adding value and flexibility to the Inspect F50.