Scanning Electron Microscopes (SEM)
Solutions for enhanced performance and analysis
Scanning Electron Microscopes (SEM) are used for inspecting topographies of materials with a magnification range that encompasses that of optical microscopy and extends it to the nanoscale. FEI offers a variety of advanced SEMs to meet customer requirements and application needs. An SEM can scan the surface of a sample with a finely focused electron beam to produce an image from the beam-specimen interactions detected by a wide array of detectors. A variety of detectors are available, from secondary electron detectors to provide surface information, to backscattered detectors for compositional information in both high or low vacuum modes.
Scanning Electron Microscopes for Research, Industrial Applications, and Natural Resources
FEI is the world leader in pioneering world-class microscopy instruments that meet customer-specific application requirements, budget and space limitations, and "after-sale" service needs. Nowhere is this more evident than in the FEI scanning electron microscope line of instruments, which include versatile, high-performance SEM's, Quanta, and the world's first extreme high-resolution (XHR) SEM, the Magellan XHR Scanning Electron Microscope.
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Magellan XHR SEM
The Magellan XHR Scanning Electron Microscope allows scientists and engineers to quickly see things they could not see before, such as 3D surface images at many different angles and at resolutions below one nanometer (about the size of ten hydrogen atoms, side-by-side). Most importantly, the Magellan XHR SEM images samples at very low beam energies, avoiding distortions otherwise caused by the beam penetrating into the material below. |
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Verios XHR SEM
The Verios™ is the second generation of FEI’s leading XHR (extreme high resolution) SEM family. It provides sub-nanometer resolution from 1 to 30 kV and enhanced contrast needed for precise measurements on materials in advanced semiconductor manufacturing and materials science applications, without compromising the high throughput, analytical capabilities, sample flexibility and ease of traditional Scanning Electron Microscope (SEM).
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Nova NanoSEM
The Nova NanoSEM line of scanning electron microscopes include low-vacuum capability, and are ideal for the diverse imaging, analytical and sample preparation demands found in research labs, semiconductor and data storage labs and fabs, biology and life sciences labs and other industries. Nova systems can accommodate EBIC, cryo stages, STEM, EDS, WDS and EBSD. |
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Quanta SEM
The Quanta Scanning Electron Microscopes are versatile, high-performance instruments with three modes (high vacuum, low vacuum and Environmental SEM) to accommodate the widest range of samples of any SEM system. All the Quanta SEM systems can be equipped with analytical systems, such as energy dispersive spectrometer, wavelength dispersive x-ray spectroscopy and electron backscatter diffraction. In addition, the field emission gun (FEG) systems contain a S/TEM detector for bright-field and dark-field sample imaging. |
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Inspect SEM
The Inspect line includes two scanning electron microscopes, one with tungsten and one with FEG, for use where high-resolution imaging is routine. These cost-effective, flexible, state-of-the-art scanning electron microscopes are built using FEI's advanced technology, making them valuable for industrial manufacturers and researchers working with material characterization and inspection applications. |