Reveal below-the-surface defects in materials and devices
A focused ion beam system (FIB) is a tool that has a high degree of analogy with a focused electron beam system such as a scanning electron microscope. In these systems the ion beam is directed towards the sample, and upon interaction it generates signals that are used to create high magnification images of the sample by mapping that signal to the beam position. The focused ions are many times more massive than electrons so when they impact a material they sputter away atoms from the surface. Also, a chemistry in gas form can be injected close to the surface and allow material deposition or material dependent selective etching.