The FEI Quanta™ family includes six variable-pressure and environmental scanning electron microscopes (ESEM™) and two DualBeam™ systems, all of which can accommodate multiple sample and imaging requirements for industrial process control labs, materials science labs and life science labs.
Quanta Family [PDF 512KB]
Advantages and Capabilities
The Quanta SEMs are versatile, high-performance scanning electron microscopes, with three modes (high vacuum, low vacuum and ESEM) to accommodate the widest range of samples of any SEM system. All the SEM systems can be equipped with analytical systems, such as energy dispersive spectrometer, wavelength dispersive x-ray spectroscopy and electron backscatter diffraction.
In addition, the field emission gun (FEG) systems contain a S/TEM detector for bright-field and dark-field sample imaging. Another variable that changes amongst the SEM systems is the size of the motorized stage (50mm, 100mm, and 150mm) and the motorized z-range (25mm, 60mm, and 65mm, respectively). The Quanta 600 and 600 FEG are each designed with a roomy chamber, enabling the analysis and navigation of large specimens.
Featured Tools in the Quanta Family
Quanta Morphologi combines the magnification and resolving power of the FEI Quanta 200 FEG scanning electron microscope (SEM) with established particle analysis software from Malvern Instruments to provide a turn-key solution for particle characterization. As opposed to indirect particle size analysis techniques, which report equivalent spherical diameter, Quanta Morphologi is a direct method to report both size and shape information.
The Quanta 3D FEG [PDF 362KB] is the most versatile high-resolution, low-vacuum SEM/FIB for 2D and 3D material characterization and analysis. Featuring three imaging modes - high-vacuum, low-vacuum and ESEM, it accommodates the widest range of samples of any SEM system. The Quanta 3D FEG's novel, field-emission electron source delivers clear and sharp electron imaging and increased electron beam current enhances EDS and EBSP analysis. This system also offers the capability for in-situ study of the dynamic behavior of materials at different humidity levels (up to 100% RH) and temperatures (up to 1500 °C).
The Quanta 200 3D [PDF 768KB] is a DualBeam system with a tungsten electron column that uses environmental SEM (ESEM) technology to section, image and analyze a wide range of conducting and non-conducting samples. This system offers the capability for in-situ dynamic experiments, 3D imaging and analysis and transmission electron microscope (TEM) sample preparation for more in-depth analysis.
Applications with Quanta Family Models
The Quanta family of microscopy tools are excellent performers for applications similar to the following: