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Quanta 3D FEG [PDF 362KB]
Quanta 3D 200i [PDF 1.29MB]
Quanta 250 [PDF 879KB]
Quanta 250 FEG [PDF 876KB]
Quanta 450 [PDF 821KB]
Quanta 450 FEG [PDF 997KB]
Quanta 650 [PDF 894KB]
Quanta 650 FEG [PDF 938KB]

Quanta 50 Series

The FEI Quanta™ family includes six variable-pressure and environmental scanning electron microscopes (ESEM™) and two DualBeam™ systems, all of which can accommodate multiple sample and imaging requirements for industrial process control labs, materials science labs and life science labs.

Quanta Family [PDF 512KB]

Advantages and Capabilities

The Quanta family are versatile, high-performance scanning electron microscopes, with three modes (high vacuum, low vacuum and ESEM) to accommodate the widest range of samples of any SEM system. All the SEM systems can be equipped with analytical systems, such as energy dispersive spectrometer, wavelength dispersive x-ray spectroscopy and electron backscatter diffraction.

In addition, the field emission gun (FEG) systems contain a S/TEM detector for bright-field and dark-field sample imaging. Another variable that changes amongst the SEM systems is the size of the motorized stage (50mm, 100mm, and 150mm) and the motorized z-range (25mm, 60mm, and 65mm, respectively). The Quanta 650 and 650 FEG are each designed with a roomy chamber, enabling the analysis and navigation of large specimens.

Featured Tools in the Quanta Family

The Quanta SEM family now includes even more flexibility with the release of the 50 series which addresses the need to investigate a wide variety of materials and characterize structure and composition, the FEI Quanta™ 50 series provides flexibility and versatility to handle the challenges of today's wide ranging research needs. View any sample and get all the data - surface and compositional images can be combined with accessories for determining material properties and elemental composition.

The Quanta 50 series adds new features such as SmartSCAN™, Multiple Image Saving and a scan preset toolbar to the easy to use control software. In addition, new features are available like the Nav-Cam™ (color sample camera), Beam Deceleration (low kV performance) and New detector options.

Quanta Morphologi combines the magnification and resolving power of the FEI Quanta 250 FEG scanning electron microscope (SEM) with established particle analysis software from Malvern Instruments to provide a turn-key solution for particle characterization. As opposed to indirect particle size analysis techniques, which report equivalent spherical diameter, Quanta Morphologi is a direct method to report both size and shape information.

The Quanta 3D FEG [PDF 362KB] is the most versatile high-resolution, low-vacuum SEM/FIB for 2D and 3D material characterization and analysis. Featuring three imaging modes - high-vacuum, low-vacuum and ESEM, it accommodates the widest range of samples of any SEM system. The Quanta 3D FEG's novel, field-emission electron source delivers clear and sharp electron imaging and increased electron beam current enhances EDS and EBSP analysis. This system also offers the capability for in-situ study of the dynamic behavior of materials at different humidity levels (up to 100% RH) and temperatures (up to 1500 °C).

The Quanta 3D 200i [PDF 1.29MB] is a DualBeam system with a tungsten electron column that uses environmental SEM (ESEM) technology to section, image and analyze a wide range of conducting and non-conducting samples. This system offers the capability for in-situ dynamic experiments, 3D imaging and analysis and atom probe or transmission electron microscope (TEM) sample preparation for more in-depth analysis.

Applications with Quanta Family Models

The Quanta family of microscopy tools are excellent performers for applications similar to the following:

RESEARCH 

INDUSTRY 

SEMICONDUCTOR & DATA STORAGE 

BIOLOGY & LIFE SCIENCES 

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Discover the Quanta Morphologi 

Quanta Morphologi combines the magnification and resolving power of the FEI Quanta 200 FEG SEM with established particle analysis software from Malvern Instruments to provide a turn-key solution for particle characterization.

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Customer Success Story: University of Oxford View [PDF 222KB]
Quanta Series: Flexible SEM Solutions
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