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Quanta™ 3D DualBeam™

Quanta 3D DualBeam
The Quanta 3D DualBeam (Focused Ion Beam combined with a Scanning Electron Microscope) brings new capabilities and flexibility to engineers and researchers needing to characterize materials, conduct failure analysis or control processes. It combines traditional thermal emission Scanning Electron Microscopy (SEM) with Focused Ion Beam (FIB) to complement your existing characterization laboratory tools and extends your applications range for 3D characterization and nanoanalysis, TEM sample preparation or structural modification of sample surfaces at the nanometer scale.
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Quanta 3D 200i DualBeam
Quanta 3D 200i
The Quanta 3D 200i is a characterization instrument designed to examine materials, conduct failure analysis and prepare samples in an industrial or academic environment. Combining Quanta scanning electron microscope (SEM) with a high current focused ion beam (FIB), creates a versatile solution for characterizing and modifying materials that is easy to use and has the flexibility to handle any sample type. The current-boosted tungsten SEM provides excellent imaging capability for sub-micron structures while the high current ion column can be used to precisely prepare a sample by removing or depositing material at a rapid rate in small defined areas. The Quanta 3D 200i will enable your laboratory to explore a new way of fast sample preparation, 3D nanoanalysis, TEM, EBSD & atom probe sample preparation or structural modification of sample surfaces at the nanometer scale.
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  Electron Beam
Resolution		 Accelerating Voltage Probe
Current stage		 Magnification Ion Beam Resolution
Quanta 3D 200i   3.5 nm @ 30 kV
@ high vacuum mode		 200V – 30kV up to 1 μA Max. horizontal field width: 10 mm
corresponds to approx.
10x magnification in quad view		 10 nm
@ 30 kV
@ 1 pA
 




Upgrades & Accessories

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1000 °C Heating Stage

1000 °C Heating Stage

Works With: Quanta 200(FEG), 250(FEG), 400(FEG), 450(FEG), 600(FEG), 650(FEG), Quanta 3D/3D(FEG) and Versa 3D (with ESEM option)
The 1000 °C heating stage is used to heat samples and record in-situ morphological sample changes.
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1500 ºC Heating Stage

1500 ºC Heating Stage

Works With: Quanta 250(FEG), 450(FEG) and 650(FEG), Quanta 3D FEG and Versa 3D
The 1500 ºC heating stage is the total heating solution to record in-situ morphological sample changes during heating up to 1500 ºC.
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6-Channel Detector Amplifier

6-Channel Detector Amplifier

Works With: Nova NanoSEMx30, Nova NanoLab, Quanta 3D(FEG) family, Versa 3D and Strata 400
Pre-amplifier for all solid-state backscattered detectors such as the low-kV solid state backscattered detector or the 14-segment retractable STEM detector. The design of the pre-amplifier allows TV-rate imaging throughput, even for solid-state backscattered detectors.
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Acoustic Enclosure

Acoustic Enclosure

Works With: Almost every SEM and Small DualBeam
The acoustic enclosure is a cover that fits the various pump(s) of the microscope system. It provides noise dampening of the pump(s) for operator and microscope. Check which enclosures we have available for your instrument.
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Additional Wehnelt

Additional Wehnelt

Works With: Scanning Electron Microscopes non FEG
The additional Wehnelt cartridge may be used to minimize system downtime during filament replacement. The cartridges are pre-centered, and normally no column alignments are necessary after cartridge replacement.
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Auto FIB

Auto FIB

Works With: Versa 3D, V600, Helios, Nova NanoLab, Strata and Quanta 3D (FEG) Series
AutoFIB is a multi-site software automation package for FEI Small DualBeam (SDB) instruments. The package allows for unattended performing of FIB tasks after macro-recording. AutoFIB’s capabilities can be extended by application-specific automation software such as AutoTEM.
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Auto TEM

Auto TEM

Works With: Versa 3D, V600, Helios, Nova NanoLab, Strata and Quanta 3D (FEG) Series
AutoTEM is automation software for unattended TEM sample preparation by Focused Ion Beam Nano-machining. Throughput typically is two samples per hour depending on the required final thickness of the sample. The AutoTEM option requires Auto FIB, Platinum or Tungsten gas chemistry.
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AutoSlice and View

AutoSlice and View

Works With: Versa 3D, V600, Helios, Nova NanoLab, Strata and Quanta 3D (FEG) Series
Automation software for unattended serial sectioning and imaging through a site-specific volume of the specimen. The sequence of images can be merged into a video or be used as the input for 3-dimensional reconstruction of the volume subjected to the slice-and-view process.
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Carbon Deposition

Carbon Deposition

Works With: Nova NanoSEM, Nova NanoLab, Helios, Strata, Q3D(FEG) Series, V600FIB and Versa 3D
Gas chemistry solution (Naphthalene) for Ion or Electron beam deposition of Carbon-based material, mounted on any of the available GIS ports.
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CCD IR Inspection Camera

CCD IR Inspection Camera

Works With: Inspect Family and Quanta 3D
The CCD camera is mounted below the chamber which provides visual feedback from inside the chamber.
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More DualBeams:

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Discover the Quanta Morphologi

Quanta Morphologi combines the magnification and resolving power of the FEI Quanta 200 FEG SEM with established particle analysis software from Malvern Instruments to provide a turn-key solution for particle characterization.

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Brazil Solves Big Crimes with Microscopic Images

Forensics Research Analyzing Sample using a Quanta 200 3D DualBeam

FEI Solutions for Forensics

Learn how Brasília’s Instituto Nacional de Criminalistica Microscopic Analysis Lab uses the Quanta 200 3D DualBeam™ system and micro-X-ray diffraction equipment to collect, evaluate, and interpret crime scene evidence.

Read the case study

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