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Quanta™ 3D DualBeam™

Quanta 3D DualBeam

The Quanta™ 3D DualBeam™ brings new capabilities and flexibility to engineers and researchers needing to characterize materials, conduct failure analysis or control processes. It combines traditional thermal emission Scanning Electron Microscopy (SEM) with Focused Ion Beam (FIB) to complement your existing characterization laboratory tools and extends your applications range for 3D characterization and nanoanalysis, TEM sample preparation or structural modification of sample surfaces at the nanometer scale.

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Quanta 3D FEG DualBeam
Quanta 3D FEG
The Quanta 3D FEG is the most versatile high-resolution, low vacuum SEM/FIB for 2D and 3D material characterization and analysis. Featuring three imaging modes - high vacuum, low vacuum and ESEM, it accommodates the widest range of samples of any SEM system. The Quanta 3D FEG's novel, field-emission electron source delivers clear and sharp electron imaging and increased electron beam current enhances EDS and EBSP analysis. This system also offers the capability for in situ study of the dynamic behavior of materials at different humidity levels (up to 100% RH) and temperatures (up to 1500 °C).

 
Quanta 3D DualBeam
Quanta 3D
The Quanta 3D brings new capabilities and flexibility to engineers and researchers needing to characterize materials, conduct failure analysis or control processes in an industrial or academic environment. It combines traditional thermal emission scanning electron microscopy (SEM) with focused ion beam (FIB) to complement your existing characterization laboratory tools and extends your applications range for 3D laboratory tools and extends your applications range for 3D characterization and nano-analysis, TEM sample preparation, or structural modification of sample surfaces at the nanometer scale. Setting the Quanta 3D apart from regular SEMs are its integrated micro-sectioning capabilities required to explore the subsurface of the specimen. The Quanta 3D is designed to be just that - a 3D-SEM.
Quanta 3D 200i DualBeam
Quanta 3D 200i
The Quanta 3D 200i is a characterization instrument designed to examine materials, conduct failure analysis and prepare samples in an industrial or academic environment. Combining Quanta scanning electron microscope (SEM) with a high current focused ion beam (FIB), creates a versatile solution for characterizing and modifying materials that is easy to use and has the flexibility to handle any sample type. The current-boosted tungsten SEM provides excellent imaging capability for sub-micron structures while the high current ion column can be used to precisely prepare a sample by removing or depositing material at a rapid rate in small defined areas. The Quanta 3D 200i will enable your laboratory to explore a new way of fast sample preparation, 3D nanoanalysis, TEM, EBSD & atom probe sample preparation or structural modification of sample surfaces at the nanometer scale.
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Quanta 3D 200i
Electron Beam Resolution: 3.5 nm @ 30 kV @ high vacuum mode
Accelerating Voltage: 200V – 30kV
Probe Current: up to 1 μA
Magnification:
Max. horizontal field width:
10 mm corresponds to approx.
10x magnification in quad view
Ion Beam Resolution: 10 nm @ 30 kV @ 1 pA

Registered members of fei.com can download the Quanta 3D 200i datasheet.

If you're not a member of fei.com, register here .

Quanta 3D FEG
Electron Beam Resolution:
1.2nm at 30kV (high SE)
1.5nm at 30kV(low SE)
Accelerating Voltage:
200V – 30kV
Probe Current: up to 200nA
Magnification: 30 x – 1280 kx in "quad" mode
Ion Beam Resolution: 7 nm at 30 kV

Registered members of fei.com can download the Quanta 3D FEG datasheet.

If you're not a member of fei.com, register here.

Life Sciences
Electronics
Research
Industry
  • Mining Exploration and Mineral Processing
  • Gun Shot Residue (GSR)
  • Pharmaceutical Formulations R&D
  • Metallurgical Research
  • Quality Control & Failure Analysis
  • Solar Photovoltaics R&D and Quality Control
  • Crime Scene Sample Analysis
  • Oil & Gas Exploration
  • CO2 Reduction for Cement and Coal
  • Agriculture & Soil Analysis
  • Airborne Particulate Analysis
  • General Particle Analysis

Upgrades & Accessories

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1000 °C Heating Stage
New Item
Featured Item

1000 °C Heating Stage

Works With: Quanta 200(FEG), 400(FEG) and 600(FEG) and Quanta 3D(FEG)
The 1000 °C heating stage is used to heat samples and record in-situ morphological sample changes.
read more details »
AutoSlice and View
Featured Item

AutoSlice and View

Works With: V600, Helios, Nova NanoLab, Strata and Quanta 3D (FEG) Series
Automation software for unattended serial sectioning and imaging through a site-specific volume of the specimen. The sequence of images can be merged into a video or be used as the input for 3-dimensional reconstruction of the volume subjected to the slice-and-view process.
read more details »
Carbon Deposition
Featured Item

Carbon Deposition

Works With: Nova NanoSEM, Nova NanoLab, Helios, Strata, Q3D(FEG) Series and V600FIB
Gas chemistry solution (Naphthalene) for Ion or Electron beam deposition of Carbon-based material, mounted on any of the available GIS ports.
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CCD IR Inspection Camera
Featured Item

CCD IR Inspection Camera

Works With: Inspect Family and Quanta 3D
The CCD camera is mounted below the chamber which provides visual feedback from inside the chamber.
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CDEM Detector
Featured Item

CDEM Detector

Works With: Nova NanoLab, Quanta 3D (FEG) Series and Helios
Channel Detection Electron Multiplier (CDEM) for direct ion imaging and ion-induced secondary electron imaging. The geometry of the detector is optimized for imaging with the ion column resulting in excellent Signal/Noise in ion imaging, as opposed to the Everhart Thornley SED which is optimized for S/N in electron imaging.
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Cryo Can
Featured Item

Cryo Can

Works With: All SEM's and Small DualBeam's
The Cryo Can decontamination device for the SEM/SDB helps to reduce contamination found in the specimen chamber created by sample out-gassing and other sources common to SEM/SDB.
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Delineation Etch
Featured Item

Delineation Etch

Works With: Nova NanoLab, Strata, Helios Series and Quanta 3D FEG
Gas chemistry (TFA) solution for decoration of FIB-prepared cross-sections, preferably mounted on GIS port 1.
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EDX on DualBeam
Featured Item

EDX on DualBeam

Works With: All DualBeam tools
On every FEI microscope a wide range of EDX detectors can be operated. i.e. from suppliers like Oxford and Edax. FEI’s special integration kits prepare your SDB support computer to control the EDX in an integrated way. The required connection cards and kits are supplied by FEI together with the EDX solution selected.
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Electrostatic Beam Blanker
Featured Item

Electrostatic Beam Blanker

Works With: Almost every SEM and Small DualBeam as long if the E-beam column contains a spare port just below the Final Lens Aperture mechanism.
The Electrostatic Beam Blanker is an essential tool for Lithography applications on SEM and Small DualBeam. This option will blank the Electron Beam when an external blanking voltage is applied.
read more details »
SIS Scandium Image Software
Featured Item

SIS Scandium Image Software

Works With: All SEM's and Small DualBeam's
This software package is an FEI-customized version of SIS Scandium basic package. It allows for direct extraction of SEM/FIB images into the SIS application.
read more details »
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More DualBeams:

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Discover the Quanta Morphologi

Quanta Morphologi combines the magnification and resolving power of the FEI Quanta 200 FEG SEM with established particle analysis software from Malvern Instruments to provide a turn-key solution for particle characterization.

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Brazil Solves Big Crimes with Microscopic Images

Forensics Research Analyzing Sample using a Quanta 200 3D DualBeam

FEI Solutions for Forensics

Learn how Brasília’s Instituto Nacional de Criminalistica Microscopic Analysis Lab uses the Quanta 200 3D DualBeam™ system and micro-X-ray diffraction equipment to collect, evaluate, and interpret crime scene evidence.

Read the case study

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