Works With: Helios 600i, Helios 650, Helios 450HP, Helios 450F1
MultiChem™ is an advanced, compact Gas Delivery System developed by FEI, to perform beam induced direct deposition of structures and chemically enhanced etching of materials in an even more controlled and flexible way. A wide selection of chemistries, inherited from the years of gas injection (GIS) activity at FEI, are available and complemented with new ones. Precise control of the deposition or etching process is achieved thanks to the fine gas flow and delivery design of the MultiChem. Safe, straightforward and versatile operation is guaranteed by its full integration in the DualBeam.