FEI, the world leader in field emission technology since 1971, offers an array of electron and ion source solutions.
Thermal Field Emitters
Schottky emission, a form of thermal field emission, is the leading electron source technology used in FEI's advanced electron beam equipment. The most common applications of Schottky emissions are seen in high resolution SEM, TEM, e-beam lithography, and Auger systems.
- Easy to use
- Long source life
- Small virtual source size
- High brightness
- High stability
- Low noise
Liquid Metal Ion Sources (LMIS)
LMIS is the answer to high resolution, focused ion beam (FIB) imaging, nanofabrication, depth profiling, SIMS*, ion doping and ion beam lithography. FEI uses LMIS in a variety of configurations: FIB columns, FIB systems, and DualBeam systems.
- High angular intensity
- Stable emission process
Single Crystal Tungsten
FEI also offers zone refined single crystal tungsten wire in a myriad of orientations, diameters, and lengths.
LaB6 and CeB6 emitters
For information about FEI's LaB6 and CeB6 emitters, contact FEI's local customer service team. For non-FEI system inquiries, contact Applied Physics Technologies.