Electron and Ion Sources
Emission, electron and ion source products include single crystal tungsten, thermal field Schottky electron emitters and liquid metal ion sources (LMIS).
UHV Focused Ion Beam (FIB) Subsystems
FEI offers cutting-edge UHV FIB columns and beam delivery systems for advanced materials research and surface science applications.
UHV Scanning Electron Microscope (SEM) Subsystems
For advance imaging and surface analysis, FEI provides two lens, electrostatic, high-resolution UHV compatible SEM columns and beam delivery systems.
OEM Custom Products
FEI custom-builds single lens Schottky field emission electrostatic electron sources for a variety of OEM applications.