Leading the world in thermal field emission sources, single lens electron sources, UHV FIB columns, UHV SEM columns and beam delivery systems, FEI component products deliver a cutting-edge performance in charged particle optics.
Electron and Ion Sources Emission, electron and ion source products include single crystal tungsten, thermal field Schottky electron emitters and liquid metal ion sources (LMIS).
UHV Focused Ion Beam (FIB) Subsystems FEI offers cutting-edge UHV FIB columns and beam delivery systems for advanced materials research and surface science applications.
UHV Scanning Electron Microscope (SEM) Subsystems For advance imaging and surface analysis, FEI provides two lens, electrostatic, high-resolution UHV compatible SEM columns and beam delivery systems.
OEM Custom Products FEI custom-builds single lens Schottky field emission electrostatic electron sources for a variety of OEM applications.
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