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Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards
Electrical test structures known as cross-bridge resistors have been patterned in (100) epitaxial silicon material that was grown on Bonded and Etched-back Silicon-On-Insulator (BESOI) substrates. The critical dimensions (CDs) of a selection of their reference segments have been measured electric...
Metallurgy and performance of electrodeposited copper for flexible circuits
The flexible printed circuits in electronic packaging are the multi-layer polymer/metal constructions, with applicationsin computer disc drive, printer and medical devices. For the flexible polymer substrate, adhesion, thermo-mechanicaldimensional stability, resistance to solvent absorption and e...
Whitepaper: Adapting The Spatial-Frequency Band Pass Of In-focus Phase-contrast Apertures For Biological Applications
Miniature electrostatic devices that are incorporated into the structure of the objective lens aperture [1] represent an attractive option for achieving in-focus phase contrast in electron microscopy. Preliminary results have been published recently, which demonstrate that such devices can be cre...