Nanometrology is the science of measurement at the nanoscale level and it has a crucial role in producing nanomaterials and devices with a high degree of accuracy and reliability in nanoscale manufacturing. Metrology of complex structures is a highly demanding application that requires extreme precision that is repeatable and reproducible and referenced to relevant attributable standards.
Metrology instruments should be compliant with good laboratory practices, and FEI produces a comprehensive suite of charged particle microscopy tools to examine and measure metals over a wide range of lengths, from millimeters down to Ångströms in both 2D and in 3D, measuring surfaces and cross sections.
FEI systems with models for nanometrology include the following: