Nanometrology is the science of measurement at the nanoscale level and it has a crucial role in producing nanomaterials and devices with a high degree of accuracy and reliability in nanoscale manufacturing. Metrology of complex structures is a highly demanding application that requires extreme precision, reproduciblilty, and referencing to attributable standards.
Metrology instruments should be compliant with good laboratory practices, and FEI produces a comprehensive suite of charged particle microscopy tools to examine and measure materials over a wide range of lengths, from millimeters down to Ångströms in both 2D and 3D, for measuring surfaces and cross-sections to provide quantitative data on critical dimensions.
Microscopes for Nanoscale Metrology:
Applications for Research: