Focused Ion beam and DualBeam FIB/SEM instruments are commonly used sample preparation applications that require site specificity to the nanometer scale. While TEM sample preparation remains the most common application in this space, it is possible to also do sample preparation for atom probe microscopy, hot stage and tensile test, EBSD analysis, and sub-surface feature metrology.
High-resolution S/TEM requires samples thin enough to transmit beam electrons, typically less than 100 nanometers. Traditional methods of sample preparation are slow, difficult and unreliable. The combination of high-resolution SEM imaging and high-precision Focused Ion Beam (FIB) milling in DualBeam instruments permits fast, reliable preparation of high-quality, site-specific samples.
Focused ion beam (FIB) sample preparation for transmission electron microscopy (TEM), or any other sample modification that uses a finely focused beam of gallium ions operated at low-beam currents for imaging and high-beam currents for site-specific milling, utilizes the best sample preparation techniques in current materials science practices.
FIB is inherently site-specific, delivering precise beam placement at the area of interest. Further, FIB is able to section metals and alloys, composite materials or organic materials rapidly. FEI's DualBeams™ offer high-throughput sample preparation, automation for creation of multiple samples and real-time cross-section monitoring with the SEM to assure creation of the highest quality TEM samples. Combining the electron or ion beam with either a gas or materials catalyst enables materials etching or deposition at the nanoscale. In addition, deposited material can be combined with in Situ probing for direct electrical measurements.
To further project the feature of interest, particularly if it is a thin film or other delicate feature, you can use electron beam deposition to ad a non-damaging layer to protect these features.
Microscopes for High Quality Sample Preparation:
Applications for Materials Science: